18 January 1989 Fabrication Of Neutron Polarizing Fe-Si Multilayers By Sputtering
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Abstract
Thin-film multilayer reflectors for polarizing neutrons have been fabricated by sputtering bilayers of ferromagnetic iron (Fe) and non-magnetic silicon (Si) onto flat glass substrates. The multilayers were deposited according to the independent variation of one of four parameters: number of bilayers; bilayer thickness (D-spacing); argon sputtering gas pressure; and target power. The relationship between the measured neutron reflectivities of these multilayers and the expected theoretical values is discussed with respect to the deposition parameters.
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Robert P. Di Nardo, Robert P. Di Nardo, Charles F. Majkrzak, Charles F. Majkrzak, Dan A. Neumann, Dan A. Neumann, } "Fabrication Of Neutron Polarizing Fe-Si Multilayers By Sputtering", Proc. SPIE 0983, Thin Film Neutron Optical Devices: Mirrors, Supermirrors, Multilayer Monochromators, Polarizers, and Beam Guides, (18 January 1989); doi: 10.1117/12.948757; https://doi.org/10.1117/12.948757
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