18 January 1989 Fabrication Of Neutron Polarizing Fe-Si Multilayers By Sputtering
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Thin-film multilayer reflectors for polarizing neutrons have been fabricated by sputtering bilayers of ferromagnetic iron (Fe) and non-magnetic silicon (Si) onto flat glass substrates. The multilayers were deposited according to the independent variation of one of four parameters: number of bilayers; bilayer thickness (D-spacing); argon sputtering gas pressure; and target power. The relationship between the measured neutron reflectivities of these multilayers and the expected theoretical values is discussed with respect to the deposition parameters.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert P. Di Nardo, Robert P. Di Nardo, Charles F. Majkrzak, Charles F. Majkrzak, Dan A. Neumann, Dan A. Neumann, } "Fabrication Of Neutron Polarizing Fe-Si Multilayers By Sputtering", Proc. SPIE 0983, Thin Film Neutron Optical Devices: Mirrors, Supermirrors, Multilayer Monochromators, Polarizers, and Beam Guides, (18 January 1989); doi: 10.1117/12.948757; https://doi.org/10.1117/12.948757


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