Abstract
A new modular set grazing goniometer, using commercial components, for characterization of thin films or stacks is described.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Corno, J. Corno, B. Pardo, B. Pardo, A Raynal, A Raynal, } "A New X-Ray Reflectometer", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948778; https://doi.org/10.1117/12.948778
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