Monolithic Fabry-Perot Structure For Soft X-Rays

Felix E. Fernandez; C. Riedel; A. Smith; B. Edwards; B. Lai; F. Cerrina; Martin J. Carr; A. D. Romig Jr.; J. Corno; L. Nevot

doi:10.1117/12.948795

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16 December 1988 Monolithic Fabry-Perot Structure For Soft X-Rays

Felix E. Fernandez, C. Riedel, A. Smith, B. Edwards, B. Lai, F. Cerrina, Martin J. Carr, A. D. Romig Jr., J. Corno, L. Nevot

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Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948795
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

The design, fabrication, and preliminary characterization and test results for reflection Fabry-Perot etalon structures operating with soft X-rays is described. The etalons were designed for maximum performance near normal incidence and for 125 Å radiation, close to the silicon L absorption edge. The structures were fabricated with a dc sputtering technique and consist of two molybdenum/silicon multilayers separated by a silicon spacer. The samples have been characterized by several complimentary methods and reflectivity measurements have been made using synchrotron radiation. The reflectance has a sharp maximum (27%) for 124 Å light incident at 10^o from normal. Interference effects between the two reflectors, through the spacer, are clearly demonstrated.

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Felix E. Fernandez, C. Riedel, A. Smith, B. Edwards, B. Lai, F. Cerrina, Martin J. Carr, A. D. Romig Jr., J. Corno, and L. Nevot "Monolithic Fabry-Perot Structure For Soft X-Rays", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948795

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