Multilayer Characterization At LPARL

D. L. Windt; R. C. Catura

doi:10.1117/12.948773

16 December 1988 Multilayer Characterization At LPARL

D. L. Windt, R. C. Catura

Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948773
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

We describe a new facility for characterization of the XUV optical performance of multilayer reflectors. Samples are loaded into an ultra-high vacuum, computer-controlled reflectometer consisting of in-vacuum stepper motor translation and rotation stages with relative positioning accuracies of 1µm and 0.1 mdeg, respectively. The reflectometer is used with a laboratory light source which provides collimated, monochromatic radiation from approximately 1800 Å to < 8 Å. The reflectometer is also easily transported for use with synchrotron radiation. Reflectance measurements, using a variety of detectors, can be made from grazing incidence to near-normal incidence, and the reflectometer can be rotated from horizontal to vertical while under vacuum in order to perform polarization-sensitive measurements. In addition to characterizing multilayer reflectors fabricated in our laboratory, the apparatus is well suited for the determination of optical constants using the reflectance versus incidence angle method.

Citation Download Citation

D. L. Windt and R. C. Catura "Multilayer Characterization At LPARL", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948773

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