16 December 1988 Overview Of Japanese Multilayer Research
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Abstract
The present status of studies on soft X-ray multilayers in Japan is briefly reviewed. This includes the design concepts, optical constants of substrates and thin films, fabrication techniques, evaluation methods, and some applications.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takeshi Namioka, "Overview Of Japanese Multilayer Research", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948779; https://doi.org/10.1117/12.948779
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KEYWORDS
Multilayers

Reflectivity

Silicon

Monochromators

Iron

Polishing

Sputter deposition

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