16 December 1988 The Soft X-Ray To Euv Performance Of Plane And Concave Pt-Si Multilayer Mirrors
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Abstract
The reflectivities of plane Pt-Si multilayer mirrors of various d-spacings and layer thickness ratios have been measured as a function of angle at wavelengths within the soft X-ray and EUV regions. The measured performance is compared with theory and the effect of heat treating the mirrors interpreted in terms of Pt film agglomeration. The imaging characteristics of a concave Pt-Si multilayer mirror are presented.
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B L Evans, J. Al-Dabbagh, B J. Kent, "The Soft X-Ray To Euv Performance Of Plane And Concave Pt-Si Multilayer Mirrors", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); doi: 10.1117/12.948776; https://doi.org/10.1117/12.948776
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