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23 February 1989 A New Micro-Displacement Stage Applied To The Precision Alignment Of Single-Mode Fibers
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Abstract
A new-type micro-displacement servo stage--lever-type flexure hinge elastic servo stage for the precision alignment of single-mode fibers has been developed. This stage not only processes high displacement resolution(≈0.1μm), small volume(≤40cm), light weight(<0.4kg), but also large movable stroke of ±50p.m. It can realize two-dimension movement on a single layer or plane and the two stages can realize the three-dimension precision alignments of sinule-mode fibers. The structure and design of this stage are presented. Piezoelectric element used as the servo driver of the stage is discussed in detail. The experi ental result shows that the aligntent accuracy of 0.1μm for single-mode fibers has been achieved by the new micro-displacement servo stage.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yun-jiang Rao and Shang-Iian Huang "A New Micro-Displacement Stage Applied To The Precision Alignment Of Single-Mode Fibers", Proc. SPIE 0988, Components for Fiber Optic Applications III and Coherent Lightwave Communications, (23 February 1989); https://doi.org/10.1117/12.959756
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