Planar GaAs Zn-Diffused Waveguides: Fabrication, Characterization And Analysis

T. Touam; C. Wu; M. Belanger; J. F. Currie; S. T. Najafi

doi:10.1117/12.960068

6 December 1988 Planar GaAs Zn-Diffused Waveguides: Fabrication, Characterization And Analysis

T. Touam, C. Wu, M. Belanger, J. F. Currie, S. T. Najafi

Proceedings Volume 0993, Integrated Optical Circuit Engineering VI; (1988) https://doi.org/10.1117/12.960068
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

GaAs planar channel waveguides are fabricated with diffused boundaries using a zinc-doped spin-on-glass source. Low-loss (Ã¢â‚¬â€? 1.9 dB/cm) single-mode waveguides are achieved. Modal properties of the waveguides are experimentally investigated. A simple model is used to analyse the waveguides.

Citation Download Citation

T. Touam, C. Wu, M. Belanger, J. F. Currie, and S. T. Najafi "Planar GaAs Zn-Diffused Waveguides: Fabrication, Characterization And Analysis", Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); https://doi.org/10.1117/12.960068

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