6 December 1988 Reproducible Fabrication Of Integrated Optical Components By Charge Controlled Ion Exchange In Glass
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Proceedings Volume 0993, Integrated Optical Circuit Engineering VI; (1988) https://doi.org/10.1117/12.960064
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States
Abstract
Integrated optical components in glass are commonly fabricated by a thermal or a field assisted ion exchange. Applying an elctrical field reduces the ion exchange time drastically. Usually the process is performed at fixed voltages and different exchange times1 . We realized that reproducibility is accompanied with great difficulties using this technique. A reproducible fabrication of optical waveguides is achieved by using the exchanged charge as the determining process parameter. The ion current is integrated by a control unit which automatically terminates the exchange process when the preset charge is reached. The charge corresponds to the amount of exchanged ions and a reproducible process is available.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Klein, R. Klein, D. Jestel, D. Jestel, H. J. Lilienhof, H. J. Lilienhof, E. Voges, E. Voges, } "Reproducible Fabrication Of Integrated Optical Components By Charge Controlled Ion Exchange In Glass", Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960064; https://doi.org/10.1117/12.960064
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