6 December 1988 Soft X-Ray Contact Printing Of Periodic Structures For Distributed Feedback (DFB) Semiconductor Lasers And Integrated Optics.
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Proceedings Volume 0993, Integrated Optical Circuit Engineering VI; (1988) https://doi.org/10.1117/12.960071
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States
Abstract
This paper describes work that has been done to develop X-ray contact printing of submicron gratings for integrated optical devices in our department. Previously, integrated optical devices, such as waveguide filters, have been made here using holographic exposure directly onto waveguide or semiconductor substrates. X-ray contact printing of holographically generated masks should make the fabrication of such devices simpler. The paper describes the work to date and gives fabrication details for the X-ray masks. X-ray contact printing is comparatively simple to perform, once the mask fabrication process is worked out. The paper describes our first results from the contact printer. In addition some results are presented on the manufacture of an X-ray mask for Quantum Dot structures.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. M. Thomas, K. M. Thomas, S. P. Beaumont, S. P. Beaumont, C. D. W. Wilkinson, C. D. W. Wilkinson, } "Soft X-Ray Contact Printing Of Periodic Structures For Distributed Feedback (DFB) Semiconductor Lasers And Integrated Optics.", Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960071; https://doi.org/10.1117/12.960071
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