Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal mechanism such as those associated with YAG or C02 processing. This paper reviews briefly the basic mechanisms associated with excimer laser ablation and presents several examples of practical applications of this new technique.
G. Darcy Poulin,
Peter A. Eisele,
"Advances In Excimer Laser Materials Processing", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960214; https://doi.org/10.1117/12.960214