16 December 1988 Improved Beam Uniformity In Excimer Lasers
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Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960203
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States
Abstract
Excimer laser marking, profiling and drilling are usually not performed at the focal region of a lens. It is usually more economical to optimize a process at a relatively low energy density and process larger areas at an image plane of a lens system. Internal(within the resonator, i.e. intracavity) methods as well as external methods are used to achieve goal.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
U. Sowada, U. Sowada, J. Sercel, J. Sercel, H. J. Kahlert, H. J. Kahlert, D. Basting, D. Basting, L. Austin, L. Austin, } "Improved Beam Uniformity In Excimer Lasers", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960203; https://doi.org/10.1117/12.960203
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