16 December 1988 Industrial Microprocessing Applications Of Excimer Lasers
Author Affiliations +
Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960213
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States
Abstract
Various industrial microprocessing applications of excimer lasers will be reviewed as well as the requirement and suitability of excimer lasers for each application.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Sercel, U. Sowada, H J Kahlert, D. Basting, L. Austin, "Industrial Microprocessing Applications Of Excimer Lasers", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960213; https://doi.org/10.1117/12.960213
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Etching of polyimide by a Q-switched CO2 laser
Proceedings of SPIE (February 07 2000)
Excimer laser ablation energy or power density? A different...
Proceedings of SPIE (September 20 2004)
Processing parameters for laser micromachining
Proceedings of SPIE (March 27 1997)
Excimer laser polymer ablation: the first twenty years
Proceedings of SPIE (September 13 2002)
Excimer laser processing of aerospace alloys
Proceedings of SPIE (April 19 1993)

Back to Top