A novel approach towards standardizing surface quality inspection

Fabian Etzold; Daniel Kiefhaber; Arno F. Warken; Peter Würtz; Jenny Hon; Jean-Michel Asfour

doi:10.1117/12.2235743

30 June 2016 A novel approach towards standardizing surface quality inspection

Fabian Etzold, Daniel Kiefhaber, Arno F. Warken, Peter Würtz, Jenny Hon, Jean-Michel Asfour

Proceedings Volume 10009, Third European Seminar on Precision Optics Manufacturing; 1000908 (2016) https://doi.org/10.1117/12.2235743
Event: Third European Seminar on Precision Optics Manufacturing, 2016, Teisnach, Germany

Abstract

Quality control of optical surfaces specified according to ISO 10110-7 and ISO 14997 today is mainly performed by visual inspection, despite the drawbacks common to all operator-dependent processes, such as a lack in reproducibility and accuracy. In this work we present a detailed validation study of the automated surface inspection system ARGOS, which is capable of classifying flats as well as curved optics. The study reveals that ARGOS detects imperfections as small as 1 μm, can accurately determine imperfection sizes larger than 4 μm, and has an average repeatability of around 1 μm.

Citation Download Citation

Fabian Etzold, Daniel Kiefhaber, Arno F. Warken, Peter Würtz, Jenny Hon, and Jean-Michel Asfour "A novel approach towards standardizing surface quality inspection", Proc. SPIE 10009, Third European Seminar on Precision Optics Manufacturing, 1000908 (30 June 2016); https://doi.org/10.1117/12.2235743

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