In this publication the vignetting field stop procedure is discussed. Additionally the deflectometric setup is described. Because of some typical influences of beam deflection to the accuracy of angle measurement by using the vignetting principle, suitable methods of calibration for the sensor are examined and the results of these methods are presented.
Furthermore the technical principle of deflectometric measurements using an angle detecting device is explained inclusive of all random and systematic errors generated by the setup.
The last part of this publication shows the actual result of test measurements with calculated absolute deviation of errors with a large lateral dimension as well as the determination of the maximal achievable lateral resolution by detecting mid frequent structures on flat and spherical test parts with a diameter of 300 mm. These measurements are compared critically to reference results which are recorded by interferometry and further scanning methods.