At first a reference surface was created by rotating a symmetrical averaged curve of all measured profiles. On the residuals of the original measurements to the symmetrical averaged curve a serial development of the error surface was applied with the help of Zernike polynomials. Different order of Zernike terms were tested because we saw a big influence on the result. This surface was added to the reference surface. The results of the two different approaches were compared. To enable us to compare the results of this measurement method to interferometric and optical 3Dprofilometric measurements the data was converted to xyz-format.
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