The main feature of these structures is that one can manipulate the phase behavior by modifying some of the geometrical parameters of the nano-antennas in order to achieve the required phase shift values for the desired applications. The first important step in experimentally obtaining a plasmonic metasurface structures is the electron beam lithography (EBL) followed by the lift-off method. Due to the small sizes of the gold nano-antennas and tight periodicity of the array a number of impediments can emerge in experimentally obtaining such geometries which can be overcome by the parameter optimization of the employed technologies.
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Roxana Tomescu, Cristian Kusko, Adrian Dinescu, Bogdan Bita, Marian Popescu, "Technological studies for plasmonic metasurfaces ," Proc. SPIE 10010, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII, 100101U (14 December 2016);