Analysis of curved shape micro-mirrors for on-chip communication

Roxana Mariana Beiu; Corina Mnerie; Virgil-Florin Duma

doi:10.1117/12.2246019

14 December 2016 Analysis of curved shape micro-mirrors for on-chip communication

Roxana Mariana Beiu, Corina Mnerie, Virgil-Florin Duma

Proceedings Volume 10010, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII; 100101Y (2016) https://doi.org/10.1117/12.2246019
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2016, 2016, Constanta, Romania

Abstract

New ways of employing optics at the micro and nanometer scale are of interest. This study analyses the most common two micro-mirror shapes (i.e., spherical and parabolic) that can be used for on-chip communication - in conjunction with fiber optics/waveguides. The classical conic sections that can be used for micro-mirrors are described and a technological approach to design and manufacture such devices is presented. Finally an optimization of the parabolic micro-mirror is achieved. Other micro-mirror shapes (e.g., elliptical and hyperbolic) can be approached and compared using the same procedure. The large area of applications of such micro-mirrors includes intra- or inter-chips communications, as well as free-space optics used for various optical systems: micro-optics, optical amplifiers, lasers, and wavelength converters.

Citation Download Citation

Roxana Mariana Beiu, Corina Mnerie, and Virgil-Florin Duma "Analysis of curved shape micro-mirrors for on-chip communication", Proc. SPIE 10010, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII, 100101Y (14 December 2016); https://doi.org/10.1117/12.2246019

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KEYWORDS

Micromirrors

Mirrors

Optical communications

Shape analysis

Spherical lenses

Photomasks

Optical fibers

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