10 December 2016 Laser-induced damage of F-SiO2 protected fluoride-based AR coatings on subsurface-damage-free CaF2 at 193 nm
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Abstract
Increased laser durability is realized by F-SiO2 protected coatings on CaF2 with subsurface-damage-free surface finishing. Surface reflection loss is reduced by fluoride-based antireflection coatings. The F-SiO2 protective coating approach can be extended to the fluoride-based AR coatings on subsurface-damage-free CaF2 optics. In this contribution, a laser-induced damage test was performed on an F-SiO2 protected fluoride-based AR coating on a subsurface-damage-free (SSD-free) CaF2 window with an ArF laser. Similar laser damage resistance was realized on the protected AR coated optics with more than 9% transmission gain when compared to that of the F-SiO2 coated.
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Jue Wang, Jue Wang, Gerald P. Cox, Gerald P. Cox, Michael J. D'Lallo, Michael J. D'Lallo, Steven Vankerkhove, Steven Vankerkhove, Jean Francois Oudard, Jean Francois Oudard, } "Laser-induced damage of F-SiO2 protected fluoride-based AR coatings on subsurface-damage-free CaF2 at 193 nm", Proc. SPIE 10014, Laser-Induced Damage in Optical Materials 2016, 100140A (10 December 2016); doi: 10.1117/12.2243783; https://doi.org/10.1117/12.2243783
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