Laser-induced damage of F-SiO2 protected fluoride based AR coating on a subsurface-damage-free CaF2 at 193nm

Jue Wang; Gerald P. Cox; Michael J. D'Lallo; Steven Vankerkhove; Jean Francois Oudard

doi:10.1117/12.2243783

10 December 2016 Laser-induced damage of F-SiO₂ protected fluoride-based AR coatings on subsurface-damage-free CaF₂ at 193 nm

Jue Wang, Gerald P. Cox, Michael J. D'Lallo, Steven Vankerkhove, Jean Francois Oudard

Author Affiliations +

Proceedings Volume 10014, Laser-Induced Damage in Optical Materials 2016; 100140A (2016) https://doi.org/10.1117/12.2243783
Event: SPIE Laser Damage, 2016, Boulder, Colorado, United States

Abstract

Increased laser durability is realized by F-SiO₂ protected coatings on CaF₂ with subsurface-damage-free surface finishing. Surface reflection loss is reduced by fluoride-based antireflection coatings. The F-SiO₂ protective coating approach can be extended to the fluoride-based AR coatings on subsurface-damage-free CaF₂ optics. In this contribution, a laser-induced damage test was performed on an F-SiO₂ protected fluoride-based AR coating on a subsurface-damage-free (SSD-free) CaF₂ window with an ArF laser. Similar laser damage resistance was realized on the protected AR coated optics with more than 9% transmission gain when compared to that of the F-SiO₂ coated.

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Jue Wang, Gerald P. Cox, Michael J. D'Lallo, Steven Vankerkhove, and Jean Francois Oudard "Laser-induced damage of F-SiO₂ protected fluoride-based AR coatings on subsurface-damage-free CaF₂ at 193 nm", Proc. SPIE 10014, Laser-Induced Damage in Optical Materials 2016, 100140A (10 December 2016); https://doi.org/10.1117/12.2243783

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