Laser processing machines using Nd:YAG 3rd harmonic wave (355 nm) and 4th harmonic wave (266 nm) have been developed and put into practical use lately. Due to this, optical elements with high laser durability to 355 nm and 266 nm are required. Silica glass is the optical element which has high UV transmission and high laser durability. Laser-induced surface damage of the silica glass has been studied in detail, but we hardly have the significant knowledge of laserinduced bulk damage. This knowledge is required in order to evaluate the silica glass itself. That is because cracks and scratches on the surface give rise to a higher possibility of damage. Therefore, we studied the laser durability of a variety of the silica glass samples by 1-on-1 and S-on-1 laser-induced bulk damage threshold (LIDT) at 355 nm and 266 nm. In this study, we gained knowledge in three areas about bulk damage to the silica glass. First, the LIDT became lower as shot counts increased. Second, the LIDT decreased as the hydroxyl content in the silica glass increased. Last, the LIDT became higher as the hydrogen concentration in the silica glass increased. Under the UV irradiation, impurities are generated and the silica glass absorbs more light. Therefore, the LIDT decreased as shot counts increased. Also, the hydroxyl in particular generates more impurities, so damage easily occurs. On the other hand, the hydrogen reacts with impurities and absorption is suppressed. Based on these results, we can improve laser durability at 355 nm and 266 nm by reducing the hydroxyl content and increasing the hydrogen concentration in the silica glass.