Translator Disclaimer
9 November 2016 High power DUV lasers for material processing
Author Affiliations +
A frontier in laser machining has been required by material processing in DUV region because it is hard to get high power solid-state lasers in this spectral region. DUV excimer lasers are the only solution, and now the time has come to examine the new applications of material processing with DUV excimer lasers. The excimer lasers at 193nm and 248nm have been used in the semiconductor manufacturing for long years, and have field-proven stability and reliability. The high photon energy of 6.4 eV at 193nm is expected to interact directly with the chemical bond of hard-machining materials, such as CFRP, diamond and tempered glasses. We report the latest results of material processing by 193nm high power DUV laser.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toshio Mimura, Kouji Kakizaki, Hiroaki Oizumi, Masakazu Kobayashi, Junichi Fujimoto, Takashi Matsunaga, and Hakaru Mizoguchi "High power DUV lasers for material processing", Proc. SPIE 10016, High-Power Lasers and Applications VIII, 1001603 (9 November 2016);


DUV high power lasers processing for glass and CFRP
Proceedings of SPIE (May 16 2017)
Materials processing with copper vapor lasers
Proceedings of SPIE (October 01 1990)
High Average Power Slab Geometry Solid State Lasers
Proceedings of SPIE (March 24 1989)
Proceedings of SPIE (March 24 1989)

Back to Top