9 November 2016 Optical methods for correction of surface acoustic wave sensors topology
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Abstract
Nowadays surface acoustic wave sensors are produced using a photolithography method. It is expensive in small series production and do not allow further topology correction, which is important for inertial sensors. In this case, a laser ablation method seems promising. It does not require a photomask and can achieve a good matching of topologies produced on opposite sides of the wafer. Several delay lines were produced using a proposed technique. Its characteristics were explored and discussed.
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Dmitry P. Lukyanov, Sergey Shevchenko, Alexander Kukaev, Daniil Safronov, "Optical methods for correction of surface acoustic wave sensors topology", Proc. SPIE 10018, Advanced Laser Processing and Manufacturing, 100180H (9 November 2016); doi: 10.1117/12.2246438; https://doi.org/10.1117/12.2246438
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