9 November 2016 Optical methods for correction of surface acoustic wave sensors topology
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Nowadays surface acoustic wave sensors are produced using a photolithography method. It is expensive in small series production and do not allow further topology correction, which is important for inertial sensors. In this case, a laser ablation method seems promising. It does not require a photomask and can achieve a good matching of topologies produced on opposite sides of the wafer. Several delay lines were produced using a proposed technique. Its characteristics were explored and discussed.
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Dmitry P. Lukyanov, Dmitry P. Lukyanov, Sergey Shevchenko, Sergey Shevchenko, Alexander Kukaev, Alexander Kukaev, Daniil Safronov, Daniil Safronov, } "Optical methods for correction of surface acoustic wave sensors topology", Proc. SPIE 10018, Advanced Laser Processing and Manufacturing, 100180H (9 November 2016); doi: 10.1117/12.2246438; https://doi.org/10.1117/12.2246438

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