A simple and low cost method to fabricate well controllable silicon nanowires based on electrostatic adsorption of PS nanospheres

Salah E. El-Zohary; Yusuke Iguchi; Toshihiro Okamoto; Masanobu Haraguchi

doi:10.1117/12.2246604

31 October 2016 A simple and low cost method to fabricate well controllable silicon nanowires based on electrostatic adsorption of PS nanospheres

Salah E. El-Zohary, Yusuke Iguchi, Toshihiro Okamoto, Masanobu Haraguchi

Author Affiliations +

Proceedings Volume 10019, Optoelectronic Devices and Integration VI; 100190W (2016) https://doi.org/10.1117/12.2246604
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

We propose a simple and low cost method to fabricate well-controllable and organized silicon nanowire (SiNWs) arrays based on electrostatic adsorption of a monolayer of polystyrene nanospheres on Si substrate. The proposed method has been used to demonstrate the controllability of density of SiNWs avoiding complicated and expensive lithography techniques. The proposed method led to well-organized SiNWs and controlling SiNWs size and density for specific optoelectronic and nanophotonic applications.

Citation Download Citation

Salah E. El-Zohary, Yusuke Iguchi, Toshihiro Okamoto, and Masanobu Haraguchi "A simple and low cost method to fabricate well controllable silicon nanowires based on electrostatic adsorption of PS nanospheres", Proc. SPIE 10019, Optoelectronic Devices and Integration VI, 100190W (31 October 2016); https://doi.org/10.1117/12.2246604

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available