31 October 2016 A simple and low cost method to fabricate well controllable silicon nanowires based on electrostatic adsorption of PS nanospheres
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Abstract
We propose a simple and low cost method to fabricate well-controllable and organized silicon nanowire (SiNWs) arrays based on electrostatic adsorption of a monolayer of polystyrene nanospheres on Si substrate. The proposed method has been used to demonstrate the controllability of density of SiNWs avoiding complicated and expensive lithography techniques. The proposed method led to well-organized SiNWs and controlling SiNWs size and density for specific optoelectronic and nanophotonic applications.
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Salah E. El-Zohary, Salah E. El-Zohary, Yusuke Iguchi, Yusuke Iguchi, Toshihiro Okamoto, Toshihiro Okamoto, Masanobu Haraguchi, Masanobu Haraguchi, } "A simple and low cost method to fabricate well controllable silicon nanowires based on electrostatic adsorption of PS nanospheres", Proc. SPIE 10019, Optoelectronic Devices and Integration VI, 100190W (31 October 2016); doi: 10.1117/12.2246604; https://doi.org/10.1117/12.2246604
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