31 October 2016 Two-dimensional analytical modeling of a linear variable filter for spectral order sorting
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Abstract
A two-dimensional thin film thickness model based on the geometry of a commercial coater which can calculate more effectively the profiles of linear variable filters (LVFs) has been developed. This is done by isolating the substrate plane as an independent coordinate (local coordinate), while the rotation and translation matrices are used to establish the coordinate transformation and combine the characteristic vector with the step function to build a borderline which can conclude whether the local mask will block the deposition or not. The height of the local mask has been increased up to 40 mm in the proposed model, and two-dimensional simulations are developed to obtain a thin film profile deposition on the substrate inside the evaporation chamber to achieve the specific request of producing a LVF zone width in a more economical way than previously reported.
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Cheng-Hao Ko, Yueh-Hsun Wu, Symphony Chakraborty, Sheng-Yu Tsai, Chi-Tsung Hong, Bang-Ji Wang, Jih-Run Tsai, Chiu-Der Hsiao, "Two-dimensional analytical modeling of a linear variable filter for spectral order sorting", Proc. SPIE 10021, Optical Design and Testing VII, 100210I (31 October 2016); doi: 10.1117/12.2245288; https://doi.org/10.1117/12.2245288
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