24 November 2016 Spindle error motion measurement using concentric circle grating and sinusoidal frequency-modulated semiconductor lasers
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Abstract
The conventional method of measuring the radial, axial and angular spindle motion is complicated and needs large spaces. Smaller instrument is better in terms of accurate and practical measurement. A method of measuring spindle error motion using a sinusoidal phase modulation and a concentric circle grating was described in the past. In the method, the concentric circle grating with fine pitch is attached to the spindle. Three optical sensors are fixed under grating and observe appropriate position of grating. The each optical sensor consists of a sinusoidal frequency modulated semiconductor laser as the light source, and two interferometers. One interferometer measures an axial spindle motion by detecting the interference fringe between reflected beam from fixed mirror and 0th-order diffracted beam. Another interferometer measures a radial spindle motion by detecting the interference fringe between ±2nd-order diffracted beams. With these optical sensor, 3 axial and 3 radial displacement of grating can be measured. From these measured displacements, axial, radial and angular spindle motion is calculated concurrently. In the previous experiment, concurrent measurement of the one axial and one radial spindle displacement at 4rpm was described. In this paper, the sinusoidal frequency modulation realized by modulating injection current is used instead of the sinusoidal phase modulation, which contributes simplicity of the instrument. Furthermore, concurrent measurement of the 5 axis (1 axial, 2 radial and 2 angular displacements) spindle motion at 4000rpm may be described.
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Masato Higuchi, Masato Higuchi, Thanh-Tung Vu, Thanh-Tung Vu, Masato Aketagawa, Masato Aketagawa, } "Spindle error motion measurement using concentric circle grating and sinusoidal frequency-modulated semiconductor lasers", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 1002307 (24 November 2016); doi: 10.1117/12.2246235; https://doi.org/10.1117/12.2246235
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