A field calibration method to eliminate the error caused by relative tilt on roll angle measurement

Jingya Qi; Zhao Wang; Junhui Huang; Bao Yu; Jianmin Gao

doi:10.1117/12.2245718

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24 November 2016 A field calibration method to eliminate the error caused by relative tilt on roll angle measurement

Jingya Qi, Zhao Wang, Junhui Huang, Bao Yu, Jianmin Gao

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Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230B (2016) https://doi.org/10.1117/12.2245718
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

The roll angle measurement method based on a heterodyne interferometer is an efficient technique for its high precision and environmental noise immunity. The optical layout bases on a polarization-assisted conversion of the roll angle into an optical phase shift, read by a beam passing through the objective plate actuated by the roll rotation. The measurement sensitivity or the gain coefficient G is calibrated before. However, a relative tilt between the laser and objective plate always exist due to the tilt of the laser and the roll of the guide in the field long rail measurement. The relative tilt affect the value of G, thus result in the roll angle measurement error. In this paper, a method for field calibration of G is presented to eliminate the measurement error above. The field calibration layout turns the roll angle into an optical path change (OPC) by a rotary table. Thus, the roll angle can be obtained from the OPC read by a two-frequency interferometer. Together with the phase shift, an accurate G in field measurement can be obtained and the measurement error can be corrected. The optical system of the field calibration method is set up and the experiment results are given. Contrasted with the Renishaw XL-80 for calibration, the proposed field calibration method can obtain the accurate G in the field rail roll angle measurement.

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Jingya Qi, Zhao Wang, Junhui Huang, Bao Yu, and Jianmin Gao "A field calibration method to eliminate the error caused by relative tilt on roll angle measurement", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230B (24 November 2016); https://doi.org/10.1117/12.2245718

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