24 November 2016 Performance analysis of three-dimensional surface profilometry using a MEMS mirror
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Accurate 3-D shape measurement has played an increasingly important role in various diverse industrial applications, such as manufacturing, robot vision etc. To achieve a low cost, compact 3D profiling system, a phase shifting scheme with a single MEMS scanner has been proposed and studied by some international colleagues. In this paper, we establish mathematical model for the 3D profiling system to reconstruct surface contour of the object. A data processing flow chart is designed, and the algorithm is developed correspondingly, in which some means to improve accuracy are also taken into consideration. Then, numerical simulation for the whole work process of the profiling system is performed according to the theoretical model. The simulation results are analyzed in detail to get the optimal parameters. In order to verify the feasibility of the scheme, we build an experimental setup and carry out a series of experiments. The results show that the RMSE is about 6% and the range resolution is about a few millimeters.
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Yuxin Cheng, Yuxin Cheng, Sining Li, Sining Li, Guohang Shan, Guohang Shan, } "Performance analysis of three-dimensional surface profilometry using a MEMS mirror", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230D (24 November 2016); doi: 10.1117/12.2254870; https://doi.org/10.1117/12.2254870

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