24 November 2016 Full-field 3D shape measurement of specular surfaces by direct phase to depth relationship
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This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.
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Zonghua Zhang, Zonghua Zhang, Yue Liu, Yue Liu, Shujun Huang, Shujun Huang, Zhenqi Niu, Zhenqi Niu, Jiao Guo, Jiao Guo, Nan Gao, Nan Gao, Feng Gao, Feng Gao, Xiangqian Jiang, Xiangqian Jiang, } "Full-field 3D shape measurement of specular surfaces by direct phase to depth relationship", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230X (24 November 2016); doi: 10.1117/12.2246144; https://doi.org/10.1117/12.2246144

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