Measurement uncertainty evaluation of the three degree of freedom surface encoder

Kai Ni; Huanhuan Wang; Xinghui Li; Xiaohao Wang; Xiang Xiao; Qian Zhou

doi:10.1117/12.2246243

24 November 2016 Measurement uncertainty evaluation of the three degree of freedom surface encoder

Kai Ni, Huanhuan Wang, Xinghui Li, Xiaohao Wang, Xiang Xiao, Qian Zhou

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230Z (2016) https://doi.org/10.1117/12.2246243
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

A three-DOF surface encoder can be used to measure the three translational degree of freedom (DOF) displacement of a moving table. A measurement uncertainty of the developed three-DOF surface encoder was systematically investigated to confirm its feasibility on the precision positioning of planar motion stage. An expanded uncertainty of 124.4 nm has been calculated in the measurement results of testing three-axis translational motions over a range of 2.5 μm. Among those error sources, cross-talk errors caused by misalignment existing in experimental setup were identified to be the largest error source.

Citation Download Citation

Kai Ni, Huanhuan Wang, Xinghui Li, Xiaohao Wang, Xiang Xiao, and Qian Zhou "Measurement uncertainty evaluation of the three degree of freedom surface encoder", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230Z (24 November 2016); https://doi.org/10.1117/12.2246243

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