24 November 2016 Imaging ellipsometer with large field-of-view
Author Affiliations +
A polarizer-compensator-sample-analyzer (PCSA) imaging ellipsometer with large field of view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system and its tilt is monitored by an optical autocollimator. The sample, the telecentric imaging system and the CCD sensor satisfy the Scheimpflug condition. In measurement, the light extinction measurement method and the four quadrants average method are used to improve the accuracy. In experiments, a chromium thin film sample is measured by the imaging ellipsometer and a spectroscopic ellipsometer. The measurement results by two ellipsometers are consistent. The usefulness of the imaging ellipsometer is verified.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liyuan Gu, Liyuan Gu, Aijun Zeng, Aijun Zeng, Shiyu Hu, Shiyu Hu, Qiao Yuan, Qiao Yuan, Weilin Cheng, Weilin Cheng, Shanhua Zhang, Shanhua Zhang, Guohang Hu, Guohang Hu, Hongbo He, Hongbo He, Huijie Huang, Huijie Huang, } "Imaging ellipsometer with large field-of-view", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 1002315 (24 November 2016); doi: 10.1117/12.2247848; https://doi.org/10.1117/12.2247848

Back to Top