Dimensional measurement of micro parts with high aspect ratio in HIT-UOI

Hong Dang; Jiwen Cui; Kunpeng Feng; Junying Li; Shiyuan Zhao; Haoran Zhang; Jiubin Tan

doi:10.1117/12.2243738

24 November 2016 Dimensional measurement of micro parts with high aspect ratio in HIT-UOI

Hong Dang, Jiwen Cui, Kunpeng Feng, Junying Li, Shiyuan Zhao, Haoran Zhang, Jiubin Tan

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100231J (2016) https://doi.org/10.1117/12.2243738
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Micro parts with high aspect ratios have been widely used in different fields including aerospace and defense industries, while the dimensional measurement of these micro parts becomes a challenge in the field of precision measurement and instrument. To deal with this contradiction, several probes for the micro parts precision measurement have been proposed by researchers in Center of Ultra-precision Optoelectronic Instrument (UOI), Harbin Institute of Technology (HIT). In this paper, optical fiber probes with structures of spherical coupling(SC) with double optical fibers, micro focal-length collimation (MFL-collimation) and fiber Bragg grating (FBG) are described in detail. After introducing the sensing principles, both advantages and disadvantages of these probes are analyzed respectively. In order to improve the performances of these probes, several approaches are proposed. A two-dimensional orthogonal path arrangement is propounded to enhance the dimensional measurement ability of MFL-collimation probes, while a high resolution and response speed interrogation method based on differential method is used to improve the accuracy and dynamic characteristics of the FBG probes. The experiments for these special structural fiber probes are given with a focus on the characteristics of these probes, and engineering applications will also be presented to prove the availability of them. In order to improve the accuracy and the instantaneity of the engineering applications, several techniques are used in probe integration. The effectiveness of these fiber probes were therefore verified through both the analysis and experiments.

Citation Download Citation

Hong Dang, Jiwen Cui, Kunpeng Feng, Junying Li, Shiyuan Zhao, Haoran Zhang, and Jiubin Tan "Dimensional measurement of micro parts with high aspect ratio in HIT-UOI", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100231J (24 November 2016); https://doi.org/10.1117/12.2243738

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KEYWORDS

Fiber Bragg gratings

Optical fibers

Charge-coupled devices

Collimation

CCD cameras

Light sources

Spherical lenses

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