17 November 2016 Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching
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Abstract
We have developed an innovated fabrication technology of Si, GaAs, and Ge nano-structures, i.e., we called defect-free neutral beam etching. The technology has been successfully applied to prototype the quantum nano-disks and nano-wires with ferritin based bio-templates. SEM observation verifies that the designed structures are prototyped. Photoluminescence measurements demonstrates high optical quality of nano-structures based on the technology.
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S. Samukawa, S. Samukawa, Shuichi Noda, Shuichi Noda, Akio Higo, Akio Higo, Manabu Yasuda, Manabu Yasuda, Kazumi Wada, Kazumi Wada, } "Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching", Proc. SPIE 10027, Nanophotonics and Micro/Nano Optics III, 100270Q (17 November 2016); doi: 10.1117/12.2247702; https://doi.org/10.1117/12.2247702
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