In this work thermogravimetric-DTG/DSC analysis result for samples of nanocomposite metal-dielectric (FeCoZr)x(CaF2)100-x are presents. Series of samples with, metallic phase content x = 24 – 68 at.% were produced by ionbeam sputtering method in mixed atmosphere of gas argon and oxygen. Study of thermal properties, phase shifts and process of change in mass of nanocomposites were performed using the thermoanalytical system TGA/DSC-1/1600 HF (MettlerToledoInstruments). High-precision weight has a weighing range 1μg – 1g with an accuracy 1μg. The furnace makes it possible to regulate the temperature in range from room temperature to 1600°С and heating rate is 0.01 – 150°С/min. After analysis of the results established that initial and final mass of samples of the nanocomposite (FeCoZr)x(CaF2)100-x are different, namely the sample mass is increased by 2 – 20%. It is related to the oxidation of metallic phase particles of nanocomposite. DTG and DSC analysis demonstrated that oxidation of metallic phase is held in two steps, at first oxidized iron atoms, and followed oxidation of the cobalt atoms, what can be seen on the waveform in the form of two humps and whereby oxides Fe2O3, Fe3O4, Co2O3, Co3O4 are formed. Oxide coatings on the surface of atoms represents an additional barrier to electron transfer charges. When a voltage is applied to the layer of the nanocomposite are three possible ways to transfer of charges between atoms and particles of metal, whereby each has its own relaxation time.