28 September 2016 Nichrome micro-heaters as actuators for microfluidic sensors
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Proceedings Volume 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016; 1003126 (2016) https://doi.org/10.1117/12.2249184
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 2016, Wilga, Poland
Abstract
MEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Gęca, M. Gęca, T. Lizak, T. Lizak, A. Kociubiński, A. Kociubiński, M. Borecki, M. Borecki, M. L. Korwin-Pawlowski, M. L. Korwin-Pawlowski, } "Nichrome micro-heaters as actuators for microfluidic sensors", Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 1003126 (28 September 2016); doi: 10.1117/12.2249184; https://doi.org/10.1117/12.2249184
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