28 September 2016 Nichrome micro-heaters as actuators for microfluidic sensors
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Proceedings Volume 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016; 1003126 (2016) https://doi.org/10.1117/12.2249184
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 2016, Wilga, Poland
Abstract
MEMS actuators are currently widely used in the industry. Micro-heaters, being a prime example, attracted much attention in recent years due to their good operating parameters and low cost fabrication process. This paper focuses on a design and development of a micro-heater to be used as an actuator in a multiparametric capillary sensor. The micro-heater is an evolution of a previous design and uses a 200nm-thick thin film of 80/20 NiCr alloy as a heating layer. The paper presents results of fabrication and testing of the micro-heater, including temperature distribution and resistance changes during the heating cycle. Additionally, is presented a PWM based control system providing the stability of power and temperature distribution.
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M. Gęca, T. Lizak, A. Kociubiński, M. Borecki, M. L. Korwin-Pawlowski, "Nichrome micro-heaters as actuators for microfluidic sensors", Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 1003126 (28 September 2016); doi: 10.1117/12.2249184; https://doi.org/10.1117/12.2249184
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