Bayesian analysis for OPC modeling with film stack properties and posterior predictive checking

Andrew Burbine; Germain Fenger; John Sturtevant; David Fryer

doi:10.1117/12.2249680

20 October 2016 Bayesian analysis for OPC modeling with film stack properties and posterior predictive checking

Andrew Burbine; Germain Fenger; John Sturtevant; David Fryer

Author Affiliations +

Proceedings Volume 10032, 32nd European Mask and Lithography Conference; 100320N (2016) https://doi.org/10.1117/12.2249680
Event: 32nd European Mask and Lithography Conference, 2016, Dresden, Germany

Abstract

The use of optical proximity correction (OPC) demands increasingly accurate models of the photolithographic process. Model building and analysis techniques in the data science community have seen great strides in the past two decades which make better use of available information. This paper expands upon Bayesian analysis methods for parameter selection in lithographic models by increasing the parameter set and employing posterior predictive checks. Work continues with a Markov chain Monte Carlo (MCMC) search algorithm to generate posterior distributions of parameters. Models now include wafer film stack refractive indices, n and k, as parameters, recognizing the uncertainties associated with these values. Posterior predictive checks are employed as a method to validate parameter vectors discovered by the analysis, akin to cross validation.

Citation Download Citation

Andrew Burbine, Andrew Burbine, Germain Fenger, Germain Fenger, John Sturtevant, John Sturtevant, David Fryer, David Fryer, } "Bayesian analysis for OPC modeling with film stack properties and posterior predictive checking", Proc. SPIE 10032, 32nd European Mask and Lithography Conference, 100320N (20 October 2016); doi: 10.1117/12.2249680; https://doi.org/10.1117/12.2249680

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years