2 September 2016 Application of boron-doped diamond film and ZnO layer in the Fabry-Pérot interferometer
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Proceedings Volume 10034, 11th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods; 1003408 (2016) https://doi.org/10.1117/12.2243999
Event: 11th Integrated Optics - Sensors, Sensing Structures and Methods, 2016, Szczyrk, Poland
Abstract
In this article there have been presented the use of boron-doped diamond films for sensor applications. The low-finesse Fabry-Pérot interferometer working in the reflective mode has been implemented. Two kinds of reflective layers have been elaborated: boron-doped diamond thin films and zinc-oxide (ZnO) layer. Thin ZnO layers were deposited by Atomic Layer Deposition (ALD) on the face of a standard telecommunication single-mode optical fiber (SMF-28). Boron-doped diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements were performed for various lengths of the air cavity in the reflective mode. The cavity length was varied from 0 μm to 600 μm in increments of 50 μm. Representative measured spectra obtained with a cavity length of 100 μm. The preliminary investigation of elaborated the low-coherence interferometers Fabry-Pérot have shown their ability for their application in sensors applications.
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D. Majchrowicz, W. Den, M. Jędrzejewska-Szczerska, "Application of boron-doped diamond film and ZnO layer in the Fabry-Pérot interferometer ", Proc. SPIE 10034, 11th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 1003408 (2 September 2016); doi: 10.1117/12.2243999; https://doi.org/10.1117/12.2243999
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