Complementary field-effect transistors for flexible electronics

Ulrich Hilleringmann; Fábio F. Vidor; Thorsten Meyers

doi:10.1117/12.2243001

3 February 2017 Complementary field-effect transistors for flexible electronics

Ulrich Hilleringmann, Fábio F. Vidor, Thorsten Meyers

Proceedings Volume 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems; 100360K (2017) https://doi.org/10.1117/12.2243001
Event: Fourth Conference on Sensors, MEMS and Electro-Optic Systems, 2016, Skukuza, Kruger National Park, South Africa

Abstract

Key issues for flexible complementary electronics are low temperature processing, sufficient performance of the integrated p- and n-type FET devices, and cheap semiconducting and dielectric materials. Organic semiconductors commonly depict p-type behavior, whereas metal oxide semiconductors show n-type characteristics. This paper presents a new approach for common integration of organic and ZnO transistors on transparent substrates for complementary transistor electronics. The gate dielectric consists of a special high-k resin, the metallization utilizes Au and Al films. The thermal budget for processing of the devices is limited to 120°C to enable foil substrates.

Citation Download Citation

Ulrich Hilleringmann, Fábio F. Vidor, and Thorsten Meyers "Complementary field-effect transistors for flexible electronics", Proc. SPIE 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems, 100360K (3 February 2017); https://doi.org/10.1117/12.2243001

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available