Given the CMOS-compatible fabrication process for the AlN pMUTs, dense, miniaturized arrays are possible. Furthermore the smooth surface of dielectric AlN renders optical quality MEMS surfaces for integration in miniaturized photonic + ultrasound microsystems.
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J. Tillak, N. Saeed, S. Khazaaleh, J. Viegas, J. Yoo, "pMUT+ASIC integrated platform for wide range ultrasonic imaging," Proc. SPIE 10064, Photons Plus Ultrasound: Imaging and Sensing 2017, 100644W (23 March 2017);