21 March 1989 Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry
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Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949161
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
Light scattering and non-contact sensing of rough surfaces with a laser focus are two optical methods which recently have also become available as commercial instruments. Optical measurements are compared with mechanical stylus measurements and the results are discussed under consideration of the physics of the different measuring principles.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Brodmann, M. Allgauer, "Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); doi: 10.1117/12.949161; https://doi.org/10.1117/12.949161
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