21 March 1989 Measurement Of Scattering Curves Of Coated Or Uncoated Optical Surfaces: Experimental Techniques For Determining Surface Roughnesses
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Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949160
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
An apparatus built in Marseilles, which precisely measures scattered light over all space from optical surfaces, is described. Both coated and uncoated surfaces are studied. For superpolished surfaces, the total amount of scattered light does not exceed some 10-6 of the incident flux. In order to have access to precise information about the roughness spectrum, numerous experimental precautions must be taken. In particular, it is difficult to measure the roughness of a transparent substrate because of scattering from the bulk material and from the back surface. An interesting solution consists in coating the surface with a thin layer of aluminum making it thus opaque. This technique can also be applied to a surface covered with a multilayer coating, so that information concerning the roughness of the surface in contact with air can be obtained. Some results on this subject are presented to better specify the possibilities and limits of this technique. We particularly deal with scattering studies on mirrors and Fabry-Perot filters which are used for optical telecommunication demultiplexing.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. Pelletier, E. Pelletier, P. Roche, P. Roche, C. Grezes-Besset, C. Grezes-Besset, } "Measurement Of Scattering Curves Of Coated Or Uncoated Optical Surfaces: Experimental Techniques For Determining Surface Roughnesses", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); doi: 10.1117/12.949160; https://doi.org/10.1117/12.949160
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