21 March 1989 Photon Tunneling Microscopy
Author Affiliations +
Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949177
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
An evanescent field arising from photons tunneling through a total internal reflection boundary is employed as a high vertical resolution (less than 1 nm, detector-limited) height transducer which maps sample microtopography into a grayscale imagespace. A video densitometer and xyz oscilloscope restore the grayscale image to a 3D topographic image; restoration and viewing perspective manipulation are real-time. Depth of field is about 1 µm and lateral resolution is typical to an oil immersion microscope (about 0.4 µm).
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John M. Guerra, John M. Guerra, } "Photon Tunneling Microscopy", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); doi: 10.1117/12.949177; https://doi.org/10.1117/12.949177

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