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21 March 1989 Recognised Surface Finish Parameters Obtained From Diffraction Patterns Of Rough Surfaces
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Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949162
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The use of light scattering or diffraction for the determination of the surface roughness of machined metal components has been investigated by many researchers. As a result, a number of theoretical formulations relating the r.m.s. height Rq to the scattered light intensity distribution have been derived for periodic and random surfaces. Experimental results for rougher surfaces have been reported and from them the individual researchers have derived empirical relationships between the standard deviation of the angularly scattered light distribution and the r.m.s. surface slopes. Each of these relationships are claimed to be valid for a certain class of surfaces. As a result of this, commercial optical surface finish sensors, based upon light scattering have been produced. The manufacturers of these instruments have defined some new surface finish parameters like Sn and Rop, thereby contributing to the so-called "parameter rash". Based upon scalar diffraction theory, formal relationships are derived, between a The specular reflectance and the r.m.s. height parameter Rq, and b The standard deviation of the scattered light distribution andthe r.m.s. slope parameter Δq.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan H. Rakels "Recognised Surface Finish Parameters Obtained From Diffraction Patterns Of Rough Surfaces", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949162
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