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Microresonators with high quality factors have recently attracted much attention due to their ability to dramatically enhance light intensity by confining light within a small mode volume for a long period of time. They provide a versatile platform for researching on fundamental physics and practical applications ranging from nonlinear and quantum optics to ultrasensitive sensing. Lithium niobate (LN) is a artificial crystalline material with large electro-optical coefficients and high second-order nonlinearity, therefore, it is a good candidate for active photonic devices. Here, we report on our recent progresses on the mass fabrication of monocrystalline LN microdisk resonators with Q factors higher than 1e6 and LN-silica hybrid microdisk resonators with Q factors of the order of 1e5. The active tunable characteristics of the resonance wavelengths of the fabricated LN microdisk resonators and its based transmission modulations were demonstrated based on the electro-optic and thermo-optic effects of LN crystal.
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Fang Bo, Jie Wang, Zhenzhong Hao, Guoquan Zhang, Jingjun Xu, "Lithium niobate microdisk resonators on a chip (Conference Presentation)," Proc. SPIE 10090, Laser Resonators, Microresonators, and Beam Control XIX, 1009004 (21 April 2017); https://doi.org/10.1117/12.2250270