Femtosecond lasers are an enabling technology for micromachining of these materials since it is possible to machine ultrafine structures with minimum thermal impact and very precise control over material removed. An industrial femtosecond Spirit HE laser system from Spectra-Physics with pulse duration <400 fs, pulse energies of >120 μJ and average output powers of >16 W is an ideal tool for industrial micromachining of a wide range of materials with highest quality and efficiency. The laser offers process flexibility with programmable pulse energy, repetition rate, and pulse width. In this paper, we provide an overview of machining heat-sensitive materials using Spirit HE laser. In particular, we show how the laser parameters (e.g. laser wavelength, pulse duration, applied energy and repetition rate) and the processing strategy (gas assisted single pass cut vs. multi-scan process) influence the efficiency and quality of laser processing.
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