Line-shaped femtosecond laser pulses for large-area machining

Satoshi Hasegawa; Yoshio Hayasaki

doi:10.1117/12.2251271

17 February 2017 Line-shaped femtosecond laser pulses for large-area machining

Satoshi Hasegawa, Yoshio Hayasaki

Proceedings Volume 10092, Laser-based Micro- and Nanoprocessing XI; 1009212 (2017) https://doi.org/10.1117/12.2251271
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

Holographic line-shaped femtosecond processing was developed for large-area machining. It can be performed with high throughput in laser cutting, peeling, grooving, and cleaning of materials. We demonstrated the single-shot fabrication of a line structure in a glass surface using a line-shaped pulse generated by a holographic cylindrical lens displayed on a liquid-crystal spatial light modulator, a line-shaped beam deformed three-dimensionally for showing the potential of holographic line-shaped beam processing, laser peeling of an indium tin oxide film, in-process laser cleaning of debris on the surface of a fabricating sample, and laser grooving of stainless steel.

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Citation Download Citation

Satoshi Hasegawa and Yoshio Hayasaki "Line-shaped femtosecond laser pulses for large-area machining", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009212 (17 February 2017); https://doi.org/10.1117/12.2251271

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