17 February 2017 Power and pulse energy scaling for high-volume UV-laser microprocessing
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Abstract
In industrial laser micro processing, throughput is as important as process quality. Treating large areas in minimum time is pivotal in achieving reduced unit costs in high-volume production. Excimer lasers meet the requirements for clean and precise structuring and enable the smallest structures in an efficient way. The latest technical developments in high power excimer lasers is bound to take cost-efficient UV-laser micro processing to the next level and bridges the gap between achievable precision and achievable throughput. New excimer laser developments and beam concepts together with latest performance data for upscaling both UV power and UV pulse energy will be the topic of this paper against the background of upcoming market trends and high volume applications.
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Ralph Delmdahl, Ralph Delmdahl, Oliver Haupt, Oliver Haupt, Igor Bragin, Igor Bragin, Hans-Stephan Albrecht, Hans-Stephan Albrecht, } "Power and pulse energy scaling for high-volume UV-laser microprocessing", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009215 (17 February 2017); doi: 10.1117/12.2256018; https://doi.org/10.1117/12.2256018
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